San Jose, California – November 3, 2009 – Novellus Systems (NASDAQ: NVLS) announced today that it has developed a new tungsten deposition process, called LRWxT, that can effectively reduce contact and ...

WASHINGTON, D.C., October 4, 2017 -- As microchips become ever smaller and therefore faster, the shrinking size of their copper interconnects leads to increased electrical resistivity at the nanoscale ...

Tungsten oxide – when applied as a thin film nanostructure – is an important advanced material used by optics and electronics industries. Research published in February 2021 laid out a deposition ...

The measured resistivity of epitaxial tungsten layers with (001) and (011) crystal orientation vs thickness d. The tungsten Fermi surface is color coded according to the wave vector dependent Fermi ...

In a memory device, Ohmic contacts (semiconductor-to-metal interfaces) connect the active region and the metal wiring. To achieve rapid and maximal charge transmission across the Ohmic contact, a ...

As microchips become smaller, the shrinking size of their copper interconnects leads to increased electrical resistivity at the nanoscale. Finding a solution to this technical bottleneck is a problem ...